Modelo computacional bidimensional para escoamentos gasosos com transferência de calor em um reator tipo CVD / Computational model 2D for gaseous flow with heat transfer for a reactor type CVD

AUTOR(ES)
DATA DE PUBLICAÇÃO

2005

RESUMO

In this work was made the elaboration of an prototype for the computational numerical simulation of the gaseous ow, with transfer heat, applied to the reactor type CVD, existing in the Laboratorio Associado de Sensores e Materiais (LAS) of the Instituto Nacional de Pesquisas Espaciais (INPE). Initially, we intention was to dene which the best type of mesh to be used in this work, to the diffusion, due to heat transference, in the reactor type CVD was simulated using three different types of meshes: structuralized, not structuralized and mixing (constructed for multi blocks). With the denite type of mesh and aiming at to the correct implementation of the solution method of the system of equations, a study it was made still in initial character, on the behavior of the fluid between two plain plates half-infinite parallel bars. The choice for this phase of implementation test if gave, therefore, in literature exists resulted analytical for exactly, resulted these that had been used for validation of the used method. During the implementation of this simulation the task most laborious was of the coupling between the physical largeness (pressure and speed), being for this end two different types of tested methods: used for Gresho e Sani (1987) and the Semi Implicit Linked Equations (SIMPLE). Being with the type of mesh and method dened, implemented and validated the next step it was to the simulation of the behavior of the draining in the reactor. In intention to better understand the function of the three studied processes of transport in this work (forced convection, natural and diffusion due heat transfer), the behavior of the gas was simulated in four different congurations. These four configurations had been projected in way that the transport of the gas, gift in the region of the hot lament to the substrate, either helped or confused for the free and forced convection, thus indicating the paper of the convective and diffusion transport during the process of growth of the lm in the reactor type CVD.

ASSUNTO(S)

reatores químicos chemical vapor deposition escoamento de massa modelo matemático engenharia e tecnologia espacial mass flow deposição química a partir da fase vapor space engineering and technology mathematical model simulação numérica chemistry reactors numerical simulation

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