Fundamentals and applications of spectroscopic ellipsometry
AUTOR(ES)
Gonçalves, Débora, Irene, Eugene A.
FONTE
Química Nova
DATA DE PUBLICAÇÃO
2002-09
RESUMO
This paper describes the use of ellipsometry as a precise and accurate technique for characterizing substrates and overlayers. A brief historical development of ellipsometry and the basic principles necessary to understand how an ellipsometer works are presented. There are many examples of studies performed in addressing materials science issues, and several are presented here: measurements of thickness, optical properties, and modeling of surface roughness. These selected results obtained in our laboratory for substrates, Si/SiO2 interfaces, and polymers provide evidence that ellipsometry can play a critical role in characterizing different types of materials.
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