Fabrication and electrical characterization of field emission tips covered by DLC (Diamond Like Carbon) thin films / Fabricação e caracterização eletrica de ponteiras de emissão de campo recobertas com filme fino DLC (Diamond Like Carbon)

AUTOR(ES)
DATA DE PUBLICAÇÃO

2005

RESUMO

The objectives of this dissertation were the fabrication of silicon field emitter tips coated with diamond like carbon (DLC) thin films, and the study of its electrical behavior. We present the fabrication process of silicon tips that consists on four stages: photolithography, reactive ion etching SF6 plasma, thermal oxidation for sharpening, and the DLC deposition by PECVD (Plasma Enhanced Chemical Vapor Deposition). We show results obtained from the electrical characterization of tips without film and tips with DLC, by the characteristics curves I x V (current x voltage) and I x t (current x time). Current-voltage measurements followed a Fowler-Nordheim electron emission behavior. We compare these results to evaluate the change of the threshold voltage, emitted current, and emission stability, as a function of the coating with the film. In this study we fabricated silicon tips coated with DLC film with thickness of approximately 170 Å

ASSUNTO(S)

vacuum microelectronics carbon films microeletronica filmes finos de diamantes electrical characterization medidas eletricas eletrons - emissão silicio field emission silicon tips

ACESSO AO ARTIGO

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