Estudo de viabilidade de integração de micro-lâmpadas incandescentes com filtros interferenciais. / Study of viability of integration of incandescent micro-lamps with interferometric filters.

AUTOR(ES)
FONTE

IBICT - Instituto Brasileiro de Informação em Ciência e Tecnologia

DATA DE PUBLICAÇÃO

07/04/2011

RESUMO

In the present work was realized a study of the viability of integrating two optical devices: incandescent micro-lamps and interferometric filters with the intention of obtaining a single device with specific characteristics. The fabrication of these optical devices was made using dielectric materials, obtained by plasma-enhanced chemical vapor deposition (PECVD), and using conventional microelectronics techniques developed at this laboratory. Numeric simulations, fabrication process and characterization of each one of the two optical devices as well as the characterization of the obtained integrated optical device are presented. The incandescent microlamps were fabricated from a chromium filament, isolated from the environment by two dielectric silicon oxynitride layers, which is powered electrically with a continuous voltage with the purpose of increasing the temperature of the filament to reach the incandescence. With the purpose of reducing the thermal dissipation in that area, the filament was designed and fabricated to be suspended through a partial anisotropic etch of the silicon substrate. On the other hand, the interferometric filters were fabricated on glass substrates starting from a series of alternate Si3N4 and SiO2 layers deposited by PECVD, with thickness of 240 and 340 nm and refraction indexes of 1.91 and 1.46 respectively, with the purpose of producing light transmittance attenuation peaks in the visible region of the electromagnetic spectrum. Filters were fabricated with 9, 11 and 13 layers. The results of this work showed that it is possible to develop the efficient integration of these two optical devices to produce a luminous source that it allows the filtering of a certain range of wavelengths. It was also demonstrated that, the bandwidth as well as the filtering area, can be controlled through the refraction index, thickness and number of constituent layers of the interferometric filter. The results of the numeric simulations showed to be quite coherent with the obtained experimental results.

ASSUNTO(S)

integração monolítica integrated optics interferometric filters micro-lâmpadas micro-lamps monolithic integration Óptica integrada oxinitreto de silício pecvd pecvd silicon oxynitride filtros interferenciais

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