Holographic Lithography
Mostrando 1-4 de 4 artigos, teses e dissertações.
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1. Projeto e fabricação de nao-estruturas por litografa interferometrica / Design and fabrication of nano-structures by interforometric lithography
In this work the interferometric lithography technique was developed for recording periodic relief nano-structures, one and bi-dimensional, on silicon and glass substrates. In particular, the work is focused in two directions: the study of the profile of the structures recorded in photorresist, through the superimposition of interference light patterns, and
Publicado em: 2008
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2. Cristais fotonicos 2 D : projeto e fabricação / 2D photonic crystals : design and fabrication
Nesta tese foi utilizado um programa baseado em elementos finitos para projetar cristais fotônicos bidimensionais, assim como foram desenvolvidos processos de litografia holográfica para gravação destas estruturas fotônicas em filmes de carbono amorfo hidrogenado, depositados sobre substratos de vidro. O projeto dos parâmetros geométricos das estrutur
Publicado em: 2006
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3. Estudo de sistemas magneticos em estruturas periodicas / Study of magnetic systems in periodic structures
In this thesis we employ the holographic lithography (HL) technique to reproduce periodic patterns that were subsequently used as masks for the deposition of magnetic materials by sputtering. The structures present the same periodicity of the previously recorded mask. One advantage of this technique is the very good aspect ratio, even for areas of the order
Publicado em: 2005
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4. Gravação e caracterização de nanoestruturas bidimensionais em relevo
This thesis describes the recording of two dimensional surface-relief nano structures, using double holographic exposures and lithography. The experimental conditions for recording photoresist masks are described, as well as for the lithography of the two dimensional pattern in three different materials: aluminum, nickel and hydrogenated amorphous carbon. Fo
Publicado em: 2003