Projeto e fabricação de nao-estruturas por litografa interferometrica / Design and fabrication of nano-structures by interforometric lithography
AUTOR(ES)
Edson Jose de Carvalho
DATA DE PUBLICAÇÃO
2008
RESUMO
In this work the interferometric lithography technique was developed for recording periodic relief nano-structures, one and bi-dimensional, on silicon and glass substrates. In particular, the work is focused in two directions: the study of the profile of the structures recorded in photorresist, through the superimposition of interference light patterns, and the association of this technique with the usually microelectronics techniques for the silicon processing. Starting from the light patterns, generated by the superimposition of interference fringes, the photoresist relief profile was simulated in order to study the influence of some exposure and development parameters on it. For combining the interferometric lithography with the silicon technologies it was necessary to record the nano-structures on Si substrates. For this, it was necessary to deduct the Standing Wave effect in the lithography. The solution was to grow thermally a layer of SiO2, with a proper thickness, on the silicon substrate, before the application of the photorresist. To demonstrate the applicability of the developed processes for fabrication of components and devices based on nano-structures, two applications have been realized: the recording of arrays of silicon nano-tips and the recording of a master relief structure for molding a diffractive optical element of high spatial frequency. Using the interferometric lithography technique associated with the silicon corrosion for plasma RIE, high-density arrays of silicon nano-tips were fabricated, with about 106 tips/mm2 and ray of curvature of about 20nm. The electric performance of the nano-tips array as a Field Emission Device was characterized through the I x V curves measurement as well as the temporal stability of the emitted electron current. By the other side, a master of a Diffractive Optical Elements (DOE), with polarizing properties, was realized. This master structure was used in a replication process involving the nickel electroformed shim and the generation of the replicas by plastic injection molding. The optical characterization of both master and replicas were performed through the measurement of the diffraction spectrum for the two orthogonal polarization states
ASSUNTO(S)
holografia interfermetrica nanotecnologia litografia lithography grades de difração holographic interferometry grades de difração nanotechnology
