Micro e nanofabricação (fabricação de contatos eletricos) por feixe de ions focalizados / Micro and nano (manufacture of electrical contacts) with focused ion beam

AUTOR(ES)

Marcelo Macchi da Silva

DATA DE PUBLICAÇÃO

2007

RESUMO

Nanoscale science and technology is a young and burgeoning field that encompasses nearly every discipline of science and engineering, the rapid growth of the field in the past decades has been enable by the sustained advances in the fabrication and characterization of materials. This work presents the hybrid process for fabrication of micro and nanocontacts, this process include the lift - off technique and platinum deposited by FIB. For measurements, two types of test structures were fabricated: (i) 150 x 150 µm and 20 x 20 µm squares with thickness of 5, 10, 30 and 100 nm, and (ii) 30 µm long resistors with variable cross - section (50 nm x 50 nm to 1 µm x 1 µm). The Pt film resistivity has been measured by a four points probe method

ASSUNTO(S)

feixe de ions focalizados focused ion beam

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