Contribuições ao desenvolvimento de filmes de diamante microcristalino dopados com enxofre / Contributions to the development of sulphur doped microcrystalline diamond films

AUTOR(ES)
DATA DE PUBLICAÇÃO

2007

RESUMO

We present in this work the development of grown diamond films with sulphur addition. They had been grown by chemical deposition from the vapor phase (diamond CVD) using reactors of the type hot filament. For the diamond attainment with conduction of the n-type, we diluted different concentrations of carbon disulfide (CS2) in ethyl alcohol, whose vapor was dragged into reactor by hydrogen. This was done, due to the fact that sulphur can act as a donor in diamond. The Raman spectroscopy showed exactly the good quality of the grown diamond films with the increase of the CS2 concentration. The displacement of the peak of the diamond occurred indicating that it had an average increase in the lengths of the linkings detected in the samples, possibly due to the expansion of the lattice of the diamond for the incorporation of sulphur. The images presented to a loss of the crystallinity of the intermediate samples and the excellent good crystalline facets of the initial and final samples (low and high concentration of CS2). The electric measures in four-point probe methods showed that the higher the concentration of CS2 the lower the resistivity of the produced films was, and afterwards, it went up again in the last samples. When treating the samples with nitric and sulphuric acids to make the measures for Hall effect, they had become insulators. This fact discloses that the bath removed the conducting material and that can be due to doping with sulphur in the surface and intergrain areas of the films. The Hall effect measures of the samples that had been grown at the same time of the samples treated for the bath, but without being through it, presented a conduction of the p-type due to the holes, in the same way that the samples described in articles in literature where they did not have contamination with boron, either involuntary or voluntary. They had also presented high density of carriers and a reasonable mobility. The incorporation of sulphur in the diamond film was confirmed by measures of XRF and PIXE. The increase of sulphur incorporated in the film was not proportional to the increasing concentrations of CS2. This suggests that nor all sulphur atom is electrically active, that is, not every sulphur acts as a dopant in the diamond films. Recent studies have disclosed that the presence of boron in the doping with sulphur has been decisive in the diamond attainment of the n-type.

ASSUNTO(S)

semiconductors semicondutores dopados diamante artificial sulphur doping filmes semicondutores microcrystalline diamonds

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