Study of squeeze film damping in a micro-beam resonator based on micro-polar theory

In this paper, squeeze film damping in a micro-beam resonator based on micro-polar theory has been investigated. The proposed model for this study consists of a clamped-clamped micro-beam bounded between two fixed layers. The gap between the micro-beam and layers is filled with air. As fluid behaves differently in micro scale than macro, the micro-scale fluid field in the gap has been modeled based on micro-polar theory. Equation of motion governing transverse deflection of the micro- beam based on modified couple stress theory and also non-linear Reynolds equation of the fluid field based on ...