Effect of thermal treatment on points defects of Al-N codoped ZnO films

ABSTRACT The effect of annealing temperature on the structural properties of Al-N codoped ZnO films were studied by X-ray diffraction, photoluminescence and Raman spectroscopy. ZnO films were deposited by sputtering technique on silicon substrates at 20 ºC, Al-concentration was kept constant and N-flow was changed to 6, 12 and 15 sccm. A thermal treatment was performed by annealing the sample during 30 minutes at 300, 400, 500, 600 and 700 °C. Before annealing, Raman spectra shows two vibration modes located at 275 and 580 cm-1 associated to the nitrogen incorporation and the presence of poi...