2021-03

Characterization of Otto Chips by Particle Swarm Optimization

Abstract Recently a surface plasmon resonance (SPR) optical sensor, based on the Otto configuration — the Otto chip — has been developed. One essential step in the quality control of the fabrication process is characterization of the active region of several devices in a batch. Characterization is done by measuring the angular spectrum of the optical re ectance on several points across the active region of the device, and determining parameters by regression analysis of the data. Traditional gradient methods used in the regression process are extremely dependent on an initial guess and are...

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