ANN model of RF MEMS Lateral SPDT switches for millimeter wave applications

This paper presents Artificial Neural Network (ANN) implementation for the Radio Frequency (RF) and Mechanical modeling of lateral RF Micro Electro Mechanical System (MEMS) series micro machined Single pole double through (SPDT) switch. We propose an efficient approach based on ANN for analyzing the losses in ON and OFF state of lateral RF MEMS series switch by calculating the S-parameters. The double beam structure has been analyzed in terms of its return, isolation and insertion losses with the variation of its passive circuit component values. The effect of design parameters has been analyz...