An Accurate Study on Capacitive Microphone with Circular Diaphragm Using a Higher Order Elasticity Theory

Abstract This study has been undertaken to investigate the mechanical behavior of the capacitive microphone with clamped circular diaphragm using modified couple stress theory in comparison to the classical one. Presence of the length scale parameter in modified couple stress theory provides the means to evaluate the size effect on the microphone mechanical behavior. Investigating Pull-in phenomenon and dynamic behavior of the microphone are the matters provided due to the application of a step DC voltage. Also the effects of different air damping coefficients on dynamic pull-in voltage and pu...