Policarbosilanos
Mostrando 1-2 de 2 artigos, teses e dissertações.
-
1. Modificações induzidas por ions de alta energia em filmes finos de organosilicones sintetizados por PECVD / Modifications induced by high energy ions in organosilicones thin films syntesized by PECVD
Thin films of polysiloxanes, polysilazanes and polycarbosilanes, synthesized by Plasma Enhanced Chemical Vapor Deposition (PECVD), were irradiated with 170 keV He + , Ne + , Ar + and Kr + ions, at 170 keV at fluences of 1x10 14 , 5 x10 14 , 1x10 15 , 5x10 15 and 1 x10 16 ions/cm -2 . The irradiation promoted significant modifications in the atomic compositio
Publicado em: 2007
-
2. Modifications induced by high energy ions in organosilicones thin films syntesized by PECVD / Modificações induzidas por ions de alta energia em filmes finos de organosilicones sintetizados por PECVD
Thin films of polysiloxanes, polysilazanes and polycarbosilanes, synthesized by Plasma Enhanced Chemical Vapor Deposition (PECVD), were irradiated with 170 keV He + , Ne + , Ar + and Kr + ions, at 170 keV at fluences of 1x10 14 , 5 x10 14 , 1x10 15 , 5x10 15 and 1 x10 16 ions/cm -2 . The irradiation promoted significant modifications in the atomic compositio
Publicado em: 2007