Proposta de método para caracterização de propriedades termomecânicas de filmes finos utilizando dispositivos MEMS. / Proposition of thin films thermomechanical characterization using MEMS devices.
AUTOR(ES)
Marcelo Silva Guimarães
DATA DE PUBLICAÇÃO
2002
RESUMO
An important factor to develop microsystems is knowledge of materials properties and failure mechanisms. This research studies the thermal actuated microbeam mechanical behavior and propose a method in order to characterize thermomechanical properties of thin films. Silicon Oxynitride microbeams are fabricated and Nomarski microscopy was applied to observe strain and buckling phenomenon ocurrence.
ASSUNTO(S)
thin films propriedades mecânicas propriedades térmicas thermophysical properties mechanical properties mems microssistemas microelectromechanical systems microscopia nomarski nomarski microscopy filmes finos flambagem buckling
Documentos Relacionados
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- MICROWAVE DEVICES USING HIGH DIELECTRIC CONSTANT FILMS
- Characterization of sol-gel thin films by ellipsometry.
- Estudo das propriedades eletrônicas e ópticas de filmes e dispositivos poliméricos.
