NITROGEN INCORPORATION INTO AMORPHOUS FLUORINATED CARBON FILMS / ESTUDO DA INCORPORAÇÃO DE NITROGÊNIO EM FILMES DE CARBONO AMORFO FLUORADO

AUTOR(ES)
DATA DE PUBLICAÇÃO

2003

RESUMO

The tribological properties of carbon coatings of hard magnetic disks played an important role for the continuous increase of their storage capacity. The mechanical and structural properties were also important: high density, hardness and wear resistance, and low friction coefficient. In this work, we study the effects of the nitrogen incorporation into fluorinated carbon films (a-C:H:F) deposited by plasma enhanced chemical vapor deposition. The film properties were investigated by using a multitechnique approach: nuclear techniques (Rutherford backscattering, elastic recoil and nuclear reaction analyses), x-ray photoelectron spectroscopy, internal stress measurements by perfilometry, Raman and Infrared spectroscopies, atomic force microscopy and contact angle measurements. Films were deposited changing the N2 partial pressure in a precursor atmosphere also composed by a fixed CH4-CF4 mixture (1:2) (PN2: 0 - 60%), with the self-bias voltage of -350V. The results show that the film properties are controlled by the nitrogen incorporation, with an important fluorine content reduction. The internal stress reduction may result in an increase of the film adhesion. However, the contact angle decreases upon nitrogen incorporation, resulting in an increase of the friction coefficient. New studies with the goal of obtain a simultaneous increase of both fluorine and nitrogen content are suggested.

ASSUNTO(S)

thin films propriedades tribologicas carbon mechanical properties fluorine propriedades mecanicas tribological properties filmes finos fluor carbono

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