Modificação da superficie de filmes de PMMA via polimerização por plasma de CHF3 / Surface modification of PMMA films by CHF3 plasma polymerization

AUTOR(ES)
DATA DE PUBLICAÇÃO

2004

RESUMO

Polymeric materials are alternative to inorganic materials for production of optical devices as waveguides and optical fibers (POF) for light transmission. This because the molecular structure of polymers can be versatile modeled, giving materials with different refractive indices, low cost and easy processing. These devices are basically consisted by core with an external layer, cladding, of low refractive index (?) allowing light propagation into the core. The cladding materials are usually made of fluorinated polymers. In this work the surface modification of Poly (methylmethacrylate), PMMA, was studied using the plasma polymerization technique. Polymeric films of 60µm thickness were obtained by spin coating using a solution of MIBK and Xylene (30 wt% PMMA). The films were exposed to CHF3 plasma. The processing conditions followed two factorial experimental designs for gas pressure (0.5 - 2 torr) and plasma power (60 - 120 W). The surfaces of the films were characterized using infrared spectroscopy (FTIR/ A TR), contact angle of wetting, atomic force microscopy, XPS spectroscopy and gravimetry. The surface fluorination of PMMA films was confirmed by XPS analysis and also inferred due to the increase on contact angle from 70° (PMMA original) to 100°. The factorial analysis indicated that pressure is a significant factor to increase the contact angle at the lower level 0.5 torr (95% of confidence). FTIR/ATR analysis showed significant alteration on the absorbance intensity of the C=O/C-O groups after plasma. AFM topography analysis showed a tolerable increase on roughness of the surface of plasma exposed films. The thickness of the fluorinated layer was approximately 0.11 µm (estimated by gravimetry). This fluorinated layer should have lower refractive index than the PMMA, due to the high fluorine content on the film surface (F/C ratio), measured by XPS analysis

ASSUNTO(S)

polimerização em plasma plasma (ionized gases) low temperature optical properties plasma polymerization plasmas filmes finos - propriedades oticas polimeros - propriedades oticas plasma plasma de baixa temperatura optical properties thin films polymers

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