Modeling of MEMS switches for RF applications. / Modelagem de chaves MEMS para aplicações em RF.

AUTOR(ES)

Michel Bernardo Fernandes da Silva

DATA DE PUBLICAÇÃO

2007

RESUMO

In this thesis, the main concepts of MEMS, their application, fabrication processes, components and systems are addressed. The objective of the thesis is a detailed study of MEMS switches for RF applications, that present good performance at high frequencies and with a potential for bandwidth improvement. More specifically, the study was deeply conducted for shunt capacitive membrane MEMS switches over CPW - Coplanar Waveguide. In this case, the objective was to enlarge the operation bandwidth, keeping the other specifications unchanged. Starting with a switch with null operational bandwidth for criteria of minimum return loss and isolation of 20 dB, after a modification in the switch geometry, it was possible to obtain an operational bandwidth of 28 GHz and then to enlarge it to 31 GHz, keeping almost unchanged the other electric characteristics.

ASSUNTO(S)

engenharia eletrônica tecnologia de microondas bandwidth enhancement sistemas microeletromecânicos rf mems switches circuitos de microondas engenharia elétrica microelectromechanical systems

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