Medida de espessura de filmes finos com interferometro de haidinger

AUTOR(ES)
DATA DE PUBLICAÇÃO

1987

RESUMO

We introduce a non-destructive method for the thickness measurement of thin transparent films coated on transparent substrates, using a Haidinger interferometer. From the interference fractions measured for various wavelengths, and the refraction index for only one wavelength, we determine the film thickness and its chromatic dispersion through an analytic-numeric procedure

ASSUNTO(S)

filmes finos - medição interferometros

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