Estudo das propriedades acusticas do filme finode TiO2 usando SAW / Study of acoustic properties of TiO2 films with help of surface acoustic wave resonators

AUTOR(ES)
DATA DE PUBLICAÇÃO

2005

RESUMO

This thesis presents the study and design of the elements which compose a gas sensor based on Surface Acoustic Wave technology, such as, SAW Colpitts oscillator and the SAW one-port resonator that are presents in the feedback loop of an amplifier. It was done deposition of TiO2 thin film different thickness on the sensor, in order to study the effect of SAW attenuation on the border between the crystal and the film. It is shown that SAW attenuation takes place in the film in thin layer of about 500 angstroms thickness. Thickness dependence of frequency shift and Q-factor of SAW oscillator and resonator, as well as, the mass sensitivity of SAW resonator to TiO2 film are presented. The model of SAW oscillator which uses two acoustic paths, has been studied and proposed.

ASSUNTO(S)

thin films film mass senitivity filmes finos rayleigh rf oscillators. ondas de surface acoustic wave devices osciladores de radiofreqüência. rayleigh waves analise de sensibilidade ondas acusticas superficiais - dispositivos

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