Estruturas multicamadas de silício poroso para aplicação em dispositivos de cristais fotônicos. / Porous silicon multilayers structures for application in photonic crystals device.

AUTOR(ES)

Danilo Roque Huanca

DATA DE PUBLICAÇÃO

2007

RESUMO

The aim of the present work was to study and analyze the optical response of one- dimensional (1D) photonic crystal devices obtained by using the porous silicon technology. The experimental results obtained from this work showed the significant contribution to the development of a technological process for optical device fabrication in the silicon substrate. The most important contributions of the work are pointed out to improve the electrochemical process for device fabrication and thermal annealing process in order to improve the optical response of the devices. The results obtained from Scanning electronic microscopy (SEM) and from the optical response of the devices, showed that devices fabricated in the double cell and diluted HF solution improved their optical response due to minimization of the anisotropy of corrosion rate and decreasing of the surface roughness between layers. The electrochemical process used for device fabrication showed the existence of limitation on the numbers of layers because of the existence of chemical dissolution effect that became important for long time process. The 1D photonic crystal devices in PS technology showed high sensibility to thermal annealing process, due to the refraction index change after thermal annealing the photonic band gap position shift down to low wavelength region. The Fabry-Perot devices showed higher sensibility to thermal annealing process improving their optical response after annealing process. The results obtained from the present work showed that the PS 1D photonic device could be applied to optical devices fabrication in silicon technology such as optical filters, lenses, resonant cavities, wave-guide devices, diffraction grade and optical sensor device.

ASSUNTO(S)

filtros fabry-perot fabry-perot filters bragg s mirrors espelhos bragg porous silicon cristais fotônicos silício poroso photonic crystals

Documentos Relacionados

• Cristais fotonicos 2 D : projeto e fabricação
• Silício poroso obtido por ataque químico
• Silício poroso obtido por ataque químico
• Silício poroso obtido por ataque químico
• Desenvolvimento de técnica para nucleação de nanopartículas metálicas em vidros de germanato dopados com íons de túlio para aplicações em dispositivos fotônicos.