Effects of the atmosphere and substrate on the crystallization of PLZT thin films
AUTOR(ES)
Simões, A.Z., Gonzalez, A.H.M., Zaghete, M.A., Varela, J.A., Stojanovic, B.D.
FONTE
Materials Research
DATA DE PUBLICAÇÃO
2000-07
RESUMO
Lead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere.
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