Desenvolvimento de dispositivos bolométricos para detecção de radiação infravermelha distante = : Development of bolometric devices for far-infrared radiation detection / Development of bolometric devices for far-infrared radiation detection

AUTOR(ES)
FONTE

IBICT - Instituto Brasileiro de Informação em Ciência e Tecnologia

DATA DE PUBLICAÇÃO

11/07/2012

RESUMO

This work has as a main goal the fabrication and characterization of thermal sensors, described as bolometrics, which are dedicated to detection of far infrared radiation. These sensors are fabricated using microfabrication techniques and the thin films are selectives to wet etching. These mechanical microstructures are formed on silicon wafers using a surface wet etching. As these structures are obtained using conventional techniques for CI´s manufacturing, it becomes possible perform a monolithic integration of electronics and mechanical devices, allowing the integrated microsystems development. The porous gold or "gold black" used as a radiation absorber, was studied and characterized, and this study showed absorption index greater than 80%. Was developed a process to integrate this film to device. The doped polycrystalline silicon was performed to obtain TCR values near to -2% K-1 and resistance less than 1k omega . Finally, the layouts are designed, performed and tested the microstructure of various geometries such as bridges, beams, membranes, coils, among others. The devices tested presented TCR about -2.54% K-1, a response time of approximately 2 ms, responsivity about 0.35 V / W and specific detectivity about 6.04x109 mHz1/2W-1 when subjected to a 0,85 THz radiation.

ASSUNTO(S)

termistores ouro infravermelho distante detectores infravermelhos thermistors gold far infrared infrared detector microfabrication microfabricação

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