Construção de nanoestruturas e caracterização por SEM e RBS / Construction of nanostructures and characterization by SEM and RBS

AUTOR(ES)
DATA DE PUBLICAÇÃO

2008

RESUMO

Nanostructured materials have properties that make these materials different from their counterpart in higher scale that opens many novel possibilities and technical applications. One of the main issues in nanotechnology is to develop suitable methods for the analysis and characterization of nanostructures. This works studies the use of Rutherford Backscattering Spectrometry for the analysis of micro and nano copper structures, grown in polycarbonate Nuclepore® membrane templates. The test structures were made by filling the pores of the membranes with copper by electrodeposition grown on top of a thin, 5nm to 500nm gold film, deposited on one side of the membrane by Physical Vapor Deposition (PVD) reinforced by a 10um thick copper substrate deposited on top of the gold film. Scanning Electronic Microscopy (SEM) and Rutherford Backscattering Spectrometry (RBS) were used to characterize the samples. Analyzing the samples with micro and nano cylinders, the change of the RBS spectra as a function of the sample tilt angle, was studied using the approach of Metzner et al (1997) generalized to 3D structures by numerical simulations. Cylinder diameters varied from 50nm to 400nm, while their length varied from 1 to 5um. SEM analysis gives local morphological profile and an estimate for geometrical dimensions. RBS analysis provides large areal information about average geometric parameters of the analyzed structures.

ASSUNTO(S)

microscopia eletrônica e espectrometria rutherford microscopy and rutherford spectrometry eletrodeposição nanostructures nanoestruturas electrodeposition

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