Vacuum Microelectronics
Mostrando 1-5 de 5 artigos, teses e dissertações.
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1. Computational Modeling of field emission tips / Modelamento computacional de ponteiras de emissão de campo
This work aims to study the electrical behavior of a field emission tip, shaped in the form hemisphere on a post, through computational resources (simulations). We chose the Ansys commercial software that uses the finite element methods in the analyses of the physical phenomena to obtain the electric field in the surface of the tip. After that, a computation
Publicado em: 2007
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2. Modelamento computacional de ponteiras de emissão de campo / Computational modeling of field emission tips
Este trabalho tem como objetivo o estudo do comportamento elétrico de uma ponteira de emissão de campo, modelada na forma de um hemisfério sobre um poste, através de recursos computacionais (simulações). Escolhemos o software comercial Ansys, que utiliza o método dos elementos finitos nas análises dos fenômenos físicos para obtenção do campo elé
Publicado em: 2007
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3. Desenvolvimento de micropontas de silício com eletrodos integrados para dispositivos de emissão por efeito de campo. / Development of silicon microtips with integrated electrical contacts for field emission devices.
This work presents a fabrication method of silicon microtips with integrated electrical contacts into the structure. Our motivation is the future development of field emission devices - FED, however our focus in this research is the microstructure fabrication process. This method is based on: (i) anisotropic under-etch method that occurs in the silicon subst
Publicado em: 2007
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4. Fabrication and electrical characterization of field emission tips covered by DLC (Diamond Like Carbon) thin films / Fabricação e caracterização eletrica de ponteiras de emissão de campo recobertas com filme fino DLC (Diamond Like Carbon)
The objectives of this dissertation were the fabrication of silicon field emitter tips coated with diamond like carbon (DLC) thin films, and the study of its electrical behavior. We present the fabrication process of silicon tips that consists on four stages: photolithography, reactive ion etching SF6 plasma, thermal oxidation for sharpening, and the DLC dep
Publicado em: 2005
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5. The birth and evolution of surface science: Child of the union of science and technology
This article is an account of the birth and evolution of surface science as an interdisciplinary research area. Surface science emanated from the confluence of concepts and tools in physics and chemistry with technological innovations that made it possible to determine the structure and properties of surfaces and interfaces and the dynamics of chemical react
The National Academy of Sciences.