Estudo do processo de deposição e propriedades de filmes de oxido de tungstenio obtidos por uma nova tecnicas de deposição / Study of the deposition process of tungsten oxide films obtained by a new deposition technique

AUTOR(ES)
DATA DE PUBLICAÇÃO

2003

RESUMO

This work describes a novel technique for the deposition of tungsten oxide thin films and reports an investigation on their deposition process and properties. The films were obtained in a vacuum deposition chamber fitted with a tungsten filament heated by an ac power supply. Oxygen was admitted into the chamber using mass flow meters. The films were formed on a substrate positioned near the filament from the volatile Wx Oy precursors generated on the heated filament surface from the reactions between oxygen and tungsten. Film thicknesses were measured using a perfilometer and the deposition rate, R, was determined as a function of the filament temperature, TF, pressure of oxygen in the chamber, PO2, and substrate-filament distance, D. An increase in the R-value was observed for TF increasing from 1500 to 1950 K, for a fixed PO2. The deposition rate also increased for a PO2 increase from 0.8 to 2.1 Pa, for a fixed TF. Deposition rates as high as 93 nm/min was observed for TF= 1950 K and PO2= 2.1 Pa. From the transmission ultraviolet-visible spectra of the films, the absorption coefficient and the optical gap, EG, were determined. An average EG-value of 3.56 ± 0.08 eV was found. The chemical bonds in the films were investigated using Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. In the former, unpolarized and polarized infrared beams were employed. The infrared spectroscopy data revealed the presence of water in the films. Lineshape analyses of the W4f XPS peak showed that the W-atoms were in the W+6 valence state, typical of tungsten in the WO3 stoichiometry. From Rutherford backscattering spectroscopy analysis of the films, an average O/W atomic ratio of 3.5 ± 0.3 was determined. X-ray diffraction revealed that the films were amorphous. Scanning electron microscopy analysis showed that the film surface was smooth and uniform, while the fracture micrographs of the film cross-section revealed a structureless and compact material. The electrochromic properties of the films were studied for Li + intercalation using an electrochemical cell. Coloration efficiencies of 78 and 125 cm 2C -1 at wavelengths of 632,8 and 950 nm, respectively, were measured

ASSUNTO(S)

filmes finos thin films oxido de tungstenio electrochromism deposition techniques tecnicas de deposição eletrocromismo tungsten oxide

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